Micro-, nano-fabrication and integration
Micro- and nano-fabrication is key to research in nanophotonics, where the structures of interest have dimensions ranging from a few nanometers to several microns. As a matter of fact, the effects we study take place when the specimen dimensions are comparable to the optical wavelength of interest. Furthermore, our experiments require structures that combine a variety of materials, including metals, polymers, dielectrics and semiconductors.
Some examples of realized structures
The following images illustrate some of the different structures we are fabricating for our research.
Infrastructure and collaborations
Particularily important for our work are the dual beam FIB (Nova 600 Nanolab) from FEI Company and the newly acquired e-beam direct writing system (Vistec EBPG5000).
We also very much benefit from several collaborations with other laboratories, with a specific expertise in micro- and nano-fabrication. These laboratories include at EPFL the Laboratory of Biological Network Characterization (LBNC), the Microsystems Laboratory 1 (LMIS1), and the Laboratory for Micro- and Nano-Fabrication at the Paul Scherrer Institute in Villigen (Switzerland).